An optical modulator is a device which is used to a. The beam may be carried over free space, or propagated through an (). Depending on the parameter of a light beam which is manipulated, modulators may be categorized into amplitude modulators, phase modulators, polarization modulators, etc. The easiest way to obtain modulation of intensity of a light beam is to modulate the current driving the light source, e.g. a. This sort of modulation is c.
Exposure systems typically produce an image on the wafer using a. The photomask blocks light in some areas and lets it pass in others. ( projects a precise beam directly onto the wafer without using a mask, but it is not widely used in commercial processes.) Exposure systems may be classified by the optics that transfer the image from the mask to the wafer.
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